Effects of duty cycle and oxygen flow rate on the formation and properties of vanadium oxide films deposited by pulsed reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference46 articles.
1. Three-terminal field effect devices utilizing thin film vanadium oxide as the channel layer
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3. Synthesis, structural, and electrochemical performance of V2O5 nanotubes as cathode material for lithium battery
4. Electrical properties of vanadium oxide thin films for bolometer applications: processed by pulse dc sputtering
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