Energy and substance transfer in magnetron sputtering systems with liquid-phase target-Reference-Cited by-同舟云学术

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Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Published:2016-02 Issue: Volume:124 Page:11-17
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Bleykher G.A.,Krivobokov V.P.,Yurjeva A.V.,Sadykova I.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference18 articles.

1. Magnetron sputtering – Milestones of 30 years

2. Magnetron Systems of Ion Sputtering;Marahtanov,1990

3. Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

4. Sputtering of the magnetron diode target in the presence of an external ion beam

5. Optical properties and environmental stability of oxide coatings deposited by reactive sputtering

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1. Mechanism of Laser‐Induced Self‐Deposition of Nanoparticles Identified by In Situ Observation;Laser & Photonics Reviews;2024-08-23

2. Ion formation in thermionic-emission-assisted hot magnetron sputtering discharge;Plasma Sources Science and Technology;2023-08-01

3. Influence of Target Current on Structure and Performance of Cu Films Deposited by Oscillating Pulse Magnetron Sputtering;Coatings;2022-03-16

4. Review on chromium coated zirconium alloy accident tolerant fuel cladding;Journal of Alloys and Compounds;2022-02

5. Design of a liquid-phase magnetron sputtering small-sized source for the vacuum coating system MVTU-11-1MS;Journal of Physics: Conference Series;2021-02-01

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