Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulator–semiconductor structure for pH sensing characteristics-Reference-Cited by-同舟云学术

Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulator–semiconductor structure for pH sensing characteristics

Published:2015-08 Issue: Volume:118 Page:113-117
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Ren Chang,Yang Chia-Ming,Lyu Chengang,Hsu Chin-Yuan,Chen Tsung-Cheng,Wang Hau-Cheng,Yang Hao,Lin Wei-Tse,Juan Pi-Chun,Huang Chi-Hsien,Pijanowska Dorota G.,Wang Jer-Chyi,Tsai Jung-Ruey

Funder

National Science Council of the Republic of China

Natural Science Foundation of China

Chang Gung University

Chang Gung Memorial Hospital

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference41 articles.

1. Anion Recognition and Sensing: The State of the Art and Future Perspectives

2. Thirty years of ISFETOLOGY

3. Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements

4. Dielectric property and thermal stability of HfO2 on silicon

5. Electrical and reliability characteristics of ZrO2 deposited directly on Si for gate dielectric application

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