Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target
Author:
Funder
Russian Science Foundation
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
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4. The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering;Sidelev;Vacuum,2016
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3. Design of a liquid-phase magnetron sputtering small-sized source for the vacuum coating system MVTU-11-1MS;Journal of Physics: Conference Series;2021-02-01
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