Composition, dielectric breakdown, and bandgap of ultra-thin amorphous boron oxynitride produced by magnetron sputtering-Reference-Cited by-同舟云学术

Composition, dielectric breakdown, and bandgap of ultra-thin amorphous boron oxynitride produced by magnetron sputtering

Published:2021-06 Issue: Volume:188 Page:110211
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Arnold Corey L.^ORCID,Iheomamere Chukwudi E.^ORCID,Dockins Maddox,Gellerup Spencer,Glavin Nicholas R.,Muratore Christopher,Shepherd Nigel D.,Voevodin Andrey A.^ORCID

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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