Control of the energy of ion flow affecting electrically insulated surface in plasma processing reactor based on a beam plasma discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference25 articles.
1. Ion flows from a beam-plasma discharge
2. Beam plasma discharge at low magnetic field as plasma source for plasma processing reactor
3. An electron-beam plasma source and geometry for plasma processing
4. Production of large-area plasmas by electron beams
5. Theoretical overview of the large-area plasma processing system (LAPPS)
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