Beam plasma discharge at low magnetic field as plasma source for plasma processing reactor
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. An electron-beam plasma source and geometry for plasma processing
2. Production of large-area plasmas by electron beams
3. Theoretical overview of the large-area plasma processing system (LAPPS)
4. Applications of electron-beam generated plasmas to materials processing
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