Abstract
Abstract
The process and applications of a specific type of gaseous discharge—beam–plasma discharge (BPD)—are reviewed. A brief survey of the BPD theory is presented. The basic features of BPD in active geophysical experiments with injection of electron beams into Earth’s ionosphere are discussed. Studies of the physics of BPD have revealed the effects successively applied in plasma technology for processing nanoelectronic materials and structures.
Subject
Physics and Astronomy (miscellaneous),Condensed Matter Physics
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