Effects of H2O partial pressure on the crystallinity of ZnO thin film and electrical characteristics of film bulk acoustic wave resonators
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges
2. Effective electromechanical coupling coefficient (kt2) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film
3. Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system
4. Optimization of ZnO Piezoelectric Thin Films and Bottom Electrodes in Thin Film BulkAcoustic Wave Resonator
5. Effect of substrate surface morphology and interface microstructure in ZnO thin films formed on various substrates
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of annealing on the structural and optical properties of ZnO films grown by MOCVD;Journal of Alloys and Compounds;2011-05
2. Utilization of Water Vapor for Sputter Deposition of Thin Films;Journal of the Vacuum Society of Japan;2010
3. Effects of Ag layer and ZnO top layer thicknesses on the physical properties of ZnO/Ag/Zno multilayer system;Journal of Physics and Chemistry of Solids;2008-10
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