Utilization of Water Vapor for Sputter Deposition of Thin Films-Reference-Cited by-同舟云学术

Utilization of Water Vapor for Sputter Deposition of Thin Films

Published:2010 Issue:9 Volume:53 Page:515-520
ISSN:1882-4749
Container-title:Journal of the Vacuum Society of Japan
language:
Short-container-title:J. Vac. Soc. Jpn.

Author:

ABE Yoshio

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference49 articles.

1. 1) A. Kinbara: Supattaringu Genshou (Sputtering Phenomena) (Univ. Tokyo Press, Tokyo, 1984) p. 137 and p. 167 [in Japanese].

2. 2) A. Morimoto: in Hakumaku Handbook (Thin Film Handbook), ed. The 131st Committee on Thin Films, Japan Society for the Promotion of Science (Ohmsha, Tokyo, 2008) 2nd ed. Chap. 1, p.44 [in Japanese].

3. Approach to estimate gettering effects in Ti–O2 reactive sputtering process

4. 4) H. Kobayashi: Supatta Hakumaku (Sputtering of Thin Films), (Nikkan Kogyo Shinbun, Tokyo, 1993) p. 81 [in Japanese].

5. 5) T. Asamaki: Hakumaku Sakusei no Kiso (Fundamentals of Thin Films Formation) (Nikkan Kogyo Shinbun, Tokyo, 2005) 4th ed., p. 219 [in Japanese].

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of hydrogen and SiO₂ buffer layer insertion on electrical properties of low-resistive indium tin oxide films formed on polyethylene naphthalate films;Japanese Journal of Applied Physics;2022-10-01

2. Electrochromic properties of sputter-deposited rhodium oxide thin films of varying thickness;Thin Solid Films;2020-09

3. Electrochromic properties of rhodium oxide thin films prepared by reactive sputtering under an O2 or H2O vapor atmosphere;Solar Energy Materials and Solar Cells;2019-09

4. Reactive sputter deposition of nickel oxide thin films at liquid nitrogen temperature;Japanese Journal of Applied Physics;2017-07-06

5. Formation of hydrated yttrium oxide and titanium oxide thin films by reactive sputtering in H2O atmosphere and their electrical properties;Japanese Journal of Applied Physics;2014-05-14