Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges-Reference-Cited by-同舟云学术

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Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges

Published:2002-08 Issue:3-4 Volume:66 Page:467-472
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Yoshino Y,Takeuchi M,Inoue K,Makino T,Arai S,Hata T

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Fujishima S. Piezo ceramics, Shoka-bo 1993;38 [in Japanese].

2. VCO resonators using ZnO sputtered film;Fujishima;Jpn J Appl Phys,1983

3. Optimization of ZnO piezoelectric thin films and bottom electrodes in thin film bulk acoustic wave resonator;Yoshino;Trans IEE Jpn,2000

4. Yoshino Y, Kadota M, Ieki H, Kasanami T, Wakino K. ISPC-8, Symposium Proceedings, vol. 2. 1987. p. 2271.

5. 1998 Spring meeting proceedings;Takeuchi;Mater Res Soc,1998

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