Self-consistent particle simulation of radio frequency SF6 discharges: Role of ion recombination
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Predischarge development in N/sub 2/ and SF/sub 6/ at high gas pressure
2. SF/sub 6//N/sub 2/ mixtures: basic and HV insulation properties
3. Charged particle densities and kinetics in a radio‐frequency SF6plasma
4. Simulations of rf glow discharges inSF6by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher
5. Modeling and diagnostic of an SF/sub 6/ RF plasma at low pressure
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