Low energy ion scattering as a depth profiling tool for thin layers - Case of bromine methanol etched CdTe

Author:

Šik Ondřej,Bábor Petr,Polčák Josef,Belas EduardORCID,Moravec PavelORCID,Grmela Lubomír,Staněk JanORCID

Funder

Ministry of Education, Youth and Sports

CEITEC 2020

CEITEC Nano Research Infrastructure

Grant Agency of the Czech Republic

National Sustainability Program

Technology Agency of the Czech Republic

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference56 articles.

1. Hybrid pixel-waveform CdTe/CZT detector for use in an ultrahigh resolution MRI compatible SPECT system, Nucl. Instruments Methods Phys. Res. Sect. A Accel. Spectrometers;Cai;Detect. Assoc. Equip,2013

2. Chemical polishing of CdZnTe substrates fabricated from crystals grown by the vertical-gradient freezing method;Moravec;J. Electron. Mater.,2006

3. A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers;Zhang;Sci. Rep.,2016

4. A study of lapping and polishing damage in single-crystal CdTe;Weirauch;J. Electrochem. Soc.,1985

5. Effects of surface roughness on large-volume CdZnTe nuclear radiation detectors and removal of surface damage by chemical etching;Wright,2004

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