Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference44 articles.
1. Fundamental Aspects of Silicon Oxidation,2001
2. Materials Fundamentals of Gate Dielectrics,2005
3. High-K materials and metal gates for CMOS applications;Robertson;Mater. Sci. Eng.,2015
4. Back-end-of-line compatible transistors for monolithic 3-D integration;Datta;IEEE Micro,2019
5. Breakthroughs in 3D sequential technology;Brunet;IEEE Int. Electr. Dev. Meet,2018
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