Real-time optical characterization of thin film growth
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference78 articles.
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4. Optical monitoring of the growth of a GaAs/AlGaAs superlattice;Farrell;Semicond. Sci. Technol.,1992
5. In-situ spectral reflectance monitoring of III–V epitaxy;Killeen;J. Electron. Mater.,1994
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