Room temperature deposition of amorphous SiC thin films using low energy ion bombardment
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. Study on a PECVD SiC-coated pressure sensor
2. Enhanced stability of Ti/Pt micro-heaters using a-SiC:H passivation layers
3. Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications
4. Low-stress PECVD amorphous silicon carbide (α-SiC) layers for biomedical application
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1. Effect of substrate temperature and annealing on the structure and opto-electrical properties of silicon carbide thin films prepared by e-beam evaporation;Vacuum;2023-05
2. Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers;Vacuum;2021-09
3. Effect of DC negative bias on microstructure and surface morphology of amorphous silicon carbide films prepared by HWP-CVD;Applied Physics A;2020-03-02
4. Dual ion beam grown silicon carbide thin films: Variation of refractive index and bandgap with film thickness;Journal of Vacuum Science & Technology B;2019-07
5. Producing Of Sic-based Protective Coatings On Zirconium Fuel-element Shells By The Method Of Electron Beam Deposition;Современная электрометаллургия;2016-02-28
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