Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR–ToF

Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR–ToF–MS)

Published:2015-12 Issue: Volume:392 Page:102-110
ISSN:1387-3806
Container-title:International Journal of Mass Spectrometry
language:en
Short-container-title:International Journal of Mass Spectrometry

Author:

Hayeck Nathalie^ORCID,Temime-Roussel Brice,Gligorovski Sasho,Mizzi Aurélie,Gemayel Rachel,Tlili Sabrine,Maillot Philippe,Pic Nicolas,Vitrani Thomas,Poulet Irène,Wortham Henri

Funder

COMET

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Instrumentation

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