Defect classification on semiconductor wafers using Fisher vector and visual vocabularies coding-Reference-Cited by-同舟云学术

Defect classification on semiconductor wafers using Fisher vector and visual vocabularies coding

Published:2022-10 Issue: Volume:202 Page:111872
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Gómez-Sirvent José L.^ORCID,López de la Rosa Francisco^ORCID,Sánchez-Reolid Roberto,Morales Rafael,Fernández-Caballero Antonio^ORCID

Funder

Gobierno de España Ministerio de Ciencia e Innovación

ECSEL

Electronic Components and Systems for European Leadership

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference45 articles.

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2. Application of six sigma in semiconductor manufacturing: A case study in yield improvement;Reddy Gangidi,2019

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4. Industry survey of automatic defect classification technologies, methods, and performance;Tobin, Jr.,2002

5. A review on machine and deep learning for semiconductor defect classification in scanning electron microscope images;López de la Rosa;Appl. Sci.,2021

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