Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network-Reference-Cited by-同舟云学术

Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network

Published:2023-09 Issue: Volume:183 Page:109549
ISSN:0360-8352
Container-title:Computers & Industrial Engineering
language:en
Short-container-title:Computers & Industrial Engineering

Author:

López de la Rosa Francisco^ORCID,Gómez-Sirvent José L.^ORCID,Morales Rafael^ORCID,Sánchez-Reolid Roberto,Fernández-Caballero Antonio^ORCID

Funder

Gobierno de España Ministerio de Ciencia e Innovación

ECSEL

Electronic Components and Systems for European Leadership

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

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