Interferometric profile scanning system for measuring large planar mirror surface based on single-interferogram analysis using Fourier transform method-Reference-Cited by-同舟云学术

Interferometric profile scanning system for measuring large planar mirror surface based on single-interferogram analysis using Fourier transform method

Published:2018-03 Issue: Volume:118 Page:113-119
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Kim Jong-Ahn,Kim Jae Wan,Kang Chu-Shik,Jin Jonghan,Eom Tae Bong

Funder

Ministry of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference12 articles.

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4. Large aperture Fizeau interferometer commissioning and preliminary measurements of a long x-ray mirror at European X-ray free electron laser;Vannoi;Rev. Sci. Instrum.,2016

5. Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages;Křen;Meas. Sci. Technol.,2014

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