Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=4/a=044017/pdf
Reference10 articles.
1. High-accuracy form measurement of large optical surfaces
2. Deflectometric systems for absolute flatness measurements at PTB
3. A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability
4. Ultraprecision 3D probing system based on spherical capacitive plate
5. A capacitance based ultra-precision spindle error analyser
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