Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Development of measuring method for shape and dimension of micro-components;Shiramatsu;JSME International Journal, Series C,2004
2. Erwin Peiner, Compliant tactile sensors for high-aspect-ratio form metrology, in: Sensors, Focus on Tactile, Force and Stress Sensors, In-Tech, 2008, pp. 377–398.
3. Fundamental Principles of Engineering Nanometrology;Leach,2009
4. An elastically guided machine axis with nanometer repeatability;Seggelen;Annals of the CIRP,2005
5. Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer;Takaya;Measurement,1999
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