Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer-Reference-Cited by-同舟云学术

Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

Published:1999-01 Issue:1 Volume:25 Page:9-18
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Takaya Yasuhiro,Shimizu Hiroki,Takahashi Satoru,Miyoshi Takashi

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference9 articles.

1. K. Takamasu, S. Ozono, T. Asano, et al., Basic concept of nano-CMM (coordinate measuring machine with nanometre resolution), Proceedings of The Japan–China Bilateral Symposium on Advanced Manufacturing Engineering, Hayama, Kanagawa, Japan, 4 October, 1996, p. 155.

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4. Observation of resonances in the radiation pressure on dielectric spheres;Ashkin;Phys. Rev. Lett.,1977

5. Observation of a singlebeam gradient force optical trap for dielectric particles;Ashkin;Opt. Lett.,1986

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