An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry-Reference-Cited by-同舟云学术

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An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry

Published:2012-07 Issue:6 Volume:45 Page:1510-1514
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Chen Kun-Huang,Chiu Huang-Sen,Chen Jing-Heng,Chen You-Cheng

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference15 articles.

1. Measurement of microphone membrane displacement with an optical beam deflection technique;Benedetto;Rev. Sci. Instrum.,1995

2. Compact diffractive interferometric displacement sensor in reflection;Jourlin;Precis. Eng.,2002

3. Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements;Dobosz;Opt. Eng.,1999

4. Electronic speckle pattern interferometric systems based on a speckle reference beam;Slettemoen;Appl. Opt.,1980

5. A dual-function ESPI system for the measurement of out-of-plane displacement and slope;Bhduri;Opt. Lasers Eng.,2006

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