Measurement of microphone membrane displacement with an optical beam deflection technique
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146085
Reference6 articles.
1. Photothermal displacement spectroscopy: An optical probe for solids and surfaces
2. Optical‐beam‐deflection atomic force microscopy: The NaCl (001) surface
3. A detailed analysis of the optical beam deflection technique for use in atomic force microscopy
4. Temperature Dependence of Photothermal Displacement Signal in Silicon
5. Le dispositif d'étalonnage primaire des microphones de laboratoire de l'Institut National de Métrologie
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2. Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement;Optics & Laser Technology;2020-04
3. High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements;Sensors and Actuators A: Physical;2018-07
4. Demonstration of biased membrane static figure mapping by optical beam subpixel centroid shift;AIP Conference Proceedings;2016
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