Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements-Reference-Cited by-同舟云学术

Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements

Published:1999-06-01 Issue:6 Volume:38 Page:958
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Dobosz Marek

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference6 articles.

1. Prospectus of the High-Resolution Canon Laser Linear Encoder L-104, L-108, Canon USA, Inc., Components Division (1989).

2. Prospectus of the BG1-/10L/60 Probe Unit, Sony Magnescale, Inc., Tokyo, Japan (1989).

3. Prospectus of the LASERSCALE system Sony Magnescale, Inc., Tokyo, Japan (1993).

4. A High-Resolution Laser Scale Interferometer

5. X. Tiebang, “The research and design into an intelligence instrument with holographic diffraction grating,” inProc.2ndIMECO TC14 Int. Symp. ISMQC/IMECO, 296–310, Beijing, China (1989).

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