Transport theory of sputtering I: Depth of origin of sputtered atoms
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference22 articles.
1. P. Sigmund, in: R. Behrisch (Ed.), Sputtering by Particle Bombardment I: Top. Appl. Phys., vol. 47, Springer, Berlin, 1981, p. 9
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. Depth of origin of sputtered atoms
4. Sputtering of multicomponent materials: Elements of a theory
5. New estimates of the characteristic depth of sputtering and of the bombardment-induced segregation ratio
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