Depth of origin of sputtered atoms
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,General Engineering
Link
http://link.springer.com/content/pdf/10.1007/BF00902988.pdf
Reference12 articles.
1. P. Sigmund: Phys. Rev.184, 383 (1969);187, 768 (1969)
2. M.W. Thompson: Philos. Mag.18, 377 (1968)
3. Topics Appl. Phys.;P. Sigmund,1981
4. P. Sigmund: InInelastic Ion-Surface Collisions, ed. by N.H. Tolk et al. (Academic Press: New York 1977) p. 121
5. P. Sigmund: Appl. Phys. Lett.14, 114, (1969)
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