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sputtering processes: collision cascades and spikes

Published:1977 Issue: Volume: Page:121-152
ISSN:
Container-title:Inelastic Ion–Surface Collisions
language:
Short-container-title:

Author:

Sigmund P.

Publisher

Elsevier

Reference45 articles.

1. Festkörperzerstäubung durch Ionenbeschuß

2. “Physics of Ionized Gases”;Andersen,1974

3. “Physics of Ionized Gases 1972”;Sigmund,1972

4. Behrisch, R. Editor, “Sputtering by Ion Bombardment”. Springer Verlag, in preparation.

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