Mass dependence of sputtering characteristics for a number of metals with different properties-Reference-Cited by-同舟云学术

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Mass dependence of sputtering characteristics for a number of metals with different properties

Published:2010-10 Issue:4 Volume:85 Page:546-549
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Zykova E.Yu.,Mosunov A.S.,Colligon J.S.,Yurasova V.E.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference23 articles.

1. Sputtering by particle bombardment. 1;Behrisch,1981

2. Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

3. Low-energy sputtering yields of nickel as a function of ion mass-a reinvestigation

4. Proc.of Symp. on Sputtering;Hechtl,1980

5. Proc.of the 6th ICPIG, Paris;Fetz,1963

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Cu self-sputtering MD simulations for 0.1–5 keV ions at elevated temperatures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-01

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