In situ RBS investigation of damage production during ion implantation in AlxGa1−xAs at 20 K
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Ion damage buildup and amorphization processes in AlxGa1−xAs
2. Damage and Lattice Strain in Ion-Irradiated AlxGai-xAs
3. Damage and lattice strain in ion‐irradiated AlAs
4. Interfacial damage in ion-irradiated GaAs/AlAs superlattices
5. E. Wendler, B. Breeger, Ch. Schubert, W. Wesch, Proc. E-MRS Spring Meeting 1998 Symp. J, Nucl. Instr. and Meth. B 147 (1999) 155
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