Mechanical properties of silicon oxynitride thin films prepared by low energy ion beam assisted deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
1. Physicochemical Properties of Chemical Vapor‐Deposited Silicon Oxynitride from a SiH4 ‐ CO 2 ‐ NH 3 ‐ H 2 System
2. Fabrication and characterization of graded refractive index silicon oxynitride thin films
3. Deposition and composition of silicon oxynitride films
4. Furnace nitridation of thermal SiO/sub 2/ in pure N/sub 2/O ambient for ULSI MOS applications
5. Adhesion enhancement of metallized thin films on alumina ceramics by ion beam mixing
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5. Optimization of Hemocompatibility of Silicon Oxynitride Films;Advanced Materials Research;2009-08
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