The effects of annealing on disorder preservation in ion implanted InP
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Determination of implanted electrical profiles by a microwave contactless method: Application to selenium implantation in semi-insulating InP
2. N-type doping of indium phosphide by implantation
3. Subnanosecond pulsed laser annealing of Se‐implanted InP
4. Damage and reordering of ion‐implanted layers of InP
5. Study of ion‐implantation damage in GaAs:Be and InP:Be using Raman scattering
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Isothermal annealing of ion-bombardment-induced amorphousness in semiconductors;Journal of Physics D: Applied Physics;1996-06-14
2. High‐resistivity regions inn‐type InGaAsP produced by ion bombardment at different temperatures;Journal of Applied Physics;1994-07
3. A phenomenological model of ion-induced crystallization and amorphization;Journal of Materials Research;1991-10
4. The influence of incidence angle on disorder production in Cl and Ar ion implanted Si;Radiation Effects and Defects in Solids;1989-06
5. The effect of incidence angle on disorder production in ion implanted Si;Radiation Effects and Defects in Solids;1989-06
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