A comparative study of interatomic potentials for copper and aluminum gas phase sputter atom transport simulations
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference30 articles.
1. Energy-resolved mass spectrometry and Monte Carlo simulation of atomic transport in magnetron sputtering
2. An interferometric investigation of the thermalization of copper atoms in a magnetron sputtering discharge
3. Simulation of sputter deposition at high pressures
4. Monte Carlo numerical analysis of target erosion and film growth in a three‐dimensional sputtering chamber
5. Sputtered atom transport in high‐current gas discharges: A self‐consistent computer simulation study
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