An interferometric investigation of the thermalization of copper atoms in a magnetron sputtering discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336589
Reference16 articles.
1. On resolving the anomaly of indium-tin oxide silicon junctions
2. The thermalization of energetic atoms during the sputtering process
3. In‐line production system for sputter deposition of graded index solar absorbing films
4. Selective thermalization in sputtering to produce high T<inf>c</inf>films
5. High‐rate magnetron sputtering of high Tc Nb3Sn films
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