Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation-Reference-Cited by-同舟云学术

Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation

Published:2000-03 Issue: Volume:161-163 Page:1054-1057
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Abramof E,Beloto A.F,Ueda M,Gomes G.F,Berni L.A,Reuther H

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

2. D.J. Rej, in: Handbook of Thin Film Process Technology, IOP Publishing, 1996, p. E2.3:1

4. S. Parascandola, O. Kruse, Annual Report, Institute of Ion Beam Physics and Materials Research, Dresden, Germany, 1997, p. 40

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