A novel process for plasma immersion ion implantation and deposition with ions from vaporization of solid targets
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Reference16 articles.
1. Versatile high current metal ion implantation facility
2. Behaviour of MEVVA metal ion implantation for surface modification of materials
3. Surface tension enhancement of TRIM sputtering yields for liquid metal targets
4. Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
5. Surface energy, wettability, and blood compatibility phosphorus doped diamond-like carbon films
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1. Enhancement of acetylene gas sensing properties for a ZnO-based gas sensor produced by plasma immersion ion implantation and deposition;Materials Science in Semiconductor Processing;2019-04
2. Thin films growth by PIIID technique from hexamethyldisilazane/argon mixture;Surface and Coatings Technology;2015-12
3. Graded nanostructured interfacial layers fabricated by high power pulsed magnetron sputtering — plasma immersion ion implantation and deposition (HPPMS–PIII&D);Surface and Coatings Technology;2013-12
4. Improved corrosion resistance of tool steel H13 by means of cadmium ion implantation and deposition;Surface and Coatings Technology;2010-06
5. Plasma Immersion Ion Implantation With Lithium Atoms;IEEE Transactions on Plasma Science;2008-10
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