Author:
Brijs B,Huyghebaert C,Nauwelaerts S,Caymax M,Vandervorst W,Nakajima K,Kimura K,Bergmaier A,Döllinger G,Lennard W.N,Terwagne G,Vantomme A
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
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1. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends;Journal of Applied Physics;2013-01-14
2. Time-of-flight telescope for heavy-ion RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-08
3. A software tool enabling the analysis of small lateral features without the use of a micro-beam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
4. Analysis of thin high-k and silicide films by means of heavy ion time-of-flight forward-scattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
5. Analysis of ALD-processed thin films by ion-beam techniques;Analytical and Bioanalytical Chemistry;2005-07-14