Analysis of ALD-processed thin films by ion-beam techniques

Author:

Putkonen Matti,Sajavaara Timo,Niinistö Lauri,Keinonen Juhani

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry

Reference47 articles.

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4. Copel M, Gribelyuk M, Gusev E (2000) Appl Phys Lett 76:436

5. Putkonen M, Niinistö J, Kukli K, Sajavaara T, Karppinen M, Yamauchi H, Niinistö L (2003) Chem Vap Deposition 9:207

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