Composition changes in N2+ bombarded Ti/Si bilayers and multilayers: interplay between random and chemically guided effects
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
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1. Low-energy Ar+ ion-beam induced vanadium silicide formation at V/Si interfaces;Thin Solid Films;2009-02
2. Ion beam mixing of Ti/Al interfaces by nitrogen irradiation;Surface Science;2007-09
3. Nanoscale reactive ion beam mixing of Ti/Si and Si/Ti interfaces;Thin Solid Films;2007-02
4. Synthesis of Ti–Cr–N thin films by reactive ion-beam mixing of Ti/Cr interfaces;Surface Science;2006-06
5. Phase formation by ion beam mixing in the Ti/Si multilayer system;Applied Surface Science;2006-03
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