Growth and morphology of 6H-SiC epitaxial layers by CVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. SiC blue LED's by liquid-phase epitaxy
2. The Epitaxial Growth of Silicon Carbide
3. Epitaxial Growth of α-SiC from the Vapor Phase
4. Growth Characteristics of Alpha-Silicon Carbide
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1. Equilibrium shapes and surface selection of nanostructures in 6H-SiC;Applied Physics Letters;2017-04-03
2. Epitaxial Growth of Silicon Carbide;Fundamentals of Silicon Carbide Technology;2014-09-26
3. Step dynamics in the homoepitaxial growth of 6H-SiC by chemical vapor deposition on 1° offcut substrate using dichlorosilane as Si precursor;Journal of Applied Physics;2013-05-14
4. Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications;Chemical Reviews;2011-12-02
5. Silicon carbide epitaxial layer growths on Acheson seed crystals from silicon melt;Materials Letters;2002-12
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