Vapour growth of silicon: growth anisotropy and adsorption
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
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5. LPCVD silicon‐rich silicon nitride films for applications in micromechanics, studied with statistical experimental design*;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-09
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