Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference14 articles.
1. Oxygen transport in magnetic Czochralski growth of silicon
2. Semiconductor Silicon 1990;Kim,1990
3. Oxygen transport under an axial magnetic field in Czochralski silicon growth
4. Semiconductor Silicon 1994;Togawa,1994
5. Three-dimensional numerical analyses of the effects of a cusp magnetic field on the flows, oxygen transport and heat transfer in a Czochralski silicon melt
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