Epitaxial growth of InP on Si using MIBE technique
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference6 articles.
1. Characterization of Lattice Defect Structures at GaAs/Si Interface by Transmission Electron Microscopy
2. Dislocation reduction in epitaxial GaAs on Si(100)
3. Molecular beam epitaxy of GaAs using a mass-separated, low-energy As+ ion beam
4. Molecular Beam Epitaxy of InP Using Low Energy P+Ion Beam
5. A Molecular and Ion-Beam Epitaxy System for the Growth of III-V Compound Semiconductors Using a Mass-Separated, Low-Energy Group-V Ion Beam
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Outlook;Molecular Beam Epitaxy;1996
2. Suppression of three-dimensional island nucleation during GaAs growth on Si(100);Physical Review Letters;1991-11
3. A high-current low-energy multi-ion beam deposition system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Nucleation and epitaxial growth of InAs on Si (100) by ion‐assisted deposition;Applied Physics Letters;1989-11-27
5. Strain variations in heteroepitaxial InP‐on‐Si grown by low‐pressure metalorganic chemical vapor deposition;Applied Physics Letters;1989-05-29
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