A modified metalorganic chemical vapor deposition chemistry for improved selective area regrowth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
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1. Butt-joint Regrowth method by MOCVD for integration of evanescent wave coupled photodetector and MQW semiconductor optical amplifier;Chinese Physics B;2021-09-16
2. Position-controlled InP nanowires with 10–100 μm pitches using Au-deposited SiO2/InP patterned substrates;Applied Physics Letters;2014-02-10
3. Cl-Assisted Selective Area Growth of InP by Metalorganic Vapor Phase Epitaxy;Japanese Journal of Applied Physics;1999-02-28
4. Planar selective regrowth of high resistivity semi-insulating InP(Fe) by LP-MOVPE for buried lasers using TBP;Journal of Crystal Growth;1998-12
5. Metalorganic vapor-phase epitaxial regrowth of InP on reactive ion-etched mesa structures for p-substrate buried heterostructure laser application;Journal of Crystal Growth;1997-09
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