Implantation in InP
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference39 articles.
1. Projected Range Statistics;Gibbons,1975
2. Damage and reordering of ion‐implanted layers of InP
3. Electron Microscope Study of Annealed SiH2 + Implanted InP
4. D.E. Davies, unpublished, 1977.
5. Compensation from implantation damage in InP
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1. CHANNELING AND TEM ANALYSIS OF RADIATION DAMAGE IN ION IMPLANTED AND PULSE ELECTRON BEAM ANNEALED InP;Ion Beam Modification of Materials;1996
2. Electrical activation of group‐IV elements implanted at MeV energies in InP;Journal of Applied Physics;1992-02-15
3. Rapid isothermal processing of Si/sup +//P/sup +/ and Mg/sup +//P/sup +/ co-implantations into InP;IEEE Transactions on Electron Devices;1992
4. Anomalous photoluminescence and raman scattering behavior in heavily Mg+ ion-implanted InP;Applied Physics A Solids and Surfaces;1991-08
5. Photoluminescence study of proton-implanted InP1−xAsx:Yb;Applied Surface Science;1991-06
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