Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Flow visualization studies for optimization of OMVPE reactor design
2. The application of holographic interferometry to the visualization of flow and temperature profiles in a MOCVD reactor cell
3. Complex flow phenomena in vertical MOCVD reactors: Effects on deposition uniformity and interface abruptness
4. Growth characteristics of a vertical rotating-disk OMVPE reactor
5. Hydrodynamic dispersion in rotating-disk omvpe reactors: Numerical simulation and experimental measurements
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