The use of chloride based precursors in metalorganic vapor phase epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference28 articles.
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1. Selective Area Masked Growth (Nano to Micro);Handbook of Crystal Growth;2015
2. Faceting of a quasi-two-dimensional GaAs crystal in nanoscale patterned growth;Applied Physics Letters;2008-01-14
3. Changing planar thin film growth into self-assembled island formation by adjusting experimental conditions;Thin Solid Films;2005-04
4. Surface orientation dependency for AlGaAs growth rate with/without HCl in MOCVD;Journal of Crystal Growth;2003-12
5. Self-organized LPE growth of Al<formula><inf><roman>0.3</roman></inf></formula>Ga<formula><inf><roman>0.7</roman></inf></formula>As microtips for integrated SNOM sensors;SPIE Proceedings;2002-09-05
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