Optical in situ monitoring of solid phase crystallization of amorphous silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference17 articles.
1. High‐resolution transmission electron microscopy study of solid phase crystallized silicon thin films on SiO2: Crystal growth and defects formation
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3. Polycrystalline Silicon Thin Film Transistors for Liquid Crystal Displays
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3. On the transient amorphous silicon structures during solid phase crystallization;Journal of Non-Crystalline Solids;2013-03
4. Influence of phosphorous doping on silicon nanocrystal formation in silicon-rich silicon nitride films;Journal of Physics D: Applied Physics;2013-02-18
5. Kinetic study of solid phase crystallisation of expanding thermal plasma deposited a-Si:H;Thin Solid Films;2012-06
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