Sputtered silicon thin films for piezoresistive pressure microsensors-Reference-Cited by-同舟云学术

Sputtered silicon thin films for piezoresistive pressure microsensors

Published:1994-04 Issue:1-3 Volume:42 Page:685-688
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Obieta I.,Gracia F.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Piezoresistive elements of polycrystalline semiconductor thin films;Onuma;Sensors and Actuators,1988

2. Polycrystalline silicon-based sensors;Lüder;Sensors and Actuators,1986

3. Microcrystalline silicon thin films for sensor applications;Germer;Sensors and Actuators,1985

4. A method of measuring specific resistivity and Hall effect of disks of arbitrary shape;van der Pauw;Phillips Res. Rep.,1958

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